CS-153N HF/HNO3 Monitor

24-hour real-time monitoring of HF/HNO3 solution concentrations in semiconductor wet-etching processes

Highly Sensitive Silica Monitor SLIA-300

Measure the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb).

iHR320 Imaging Spectrometer

The iHR320 provides a platform for spectroscopic measurements for years to come.

iHR550 Imaging Spectrometer

The iHR550 spectrometer offers a unique combination of spectral quality, flexibility, robustness, and ease of use that makes it the ideal general-purpose spectrometer for performing spectral measurements with quality results.

In-line type Dissolved Ozone Monitor OZ-96i

Ideal for ozone fluid density control in semiconductor production processes

 

InGaAs Array Detector

The HORIBA Jobin Yvon family of NIR array detectors, the Symphony Series, feature spectroscopic grade InGaAs detectors in a linear array of 512 or 1024 pixels.

MicroHR Spectrometer

The MicroHR is a short focal length Czerny-Turner spectrometer that can be used as an imaging spectrograph or a scanning Monochromator. As a spectrograph, it features either a fixed or micrometer adjustable entrance slit with out unique Quick-Align CCD adapter.

Motorized MicroHR Spectrometer

Available as an imaging spectrograph or scanning monochromator, the new automated MicroHR allows users to make rapid and precise measurements, offering a degree of versatility not found in comparable focal length spectrometers.

MicroHR NIR Spectrometer

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.