Application
Low-cost Reticle/Mask Particle Detection System PR-PD5
Overview
The PR-PD5 has been designed so that it can be integrated with any other system as a apace-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process.
Features
- Reticle inversion mechanism
- 0.5μm to 50μm selectability
- Single detection system
- Built-in and combination types
Manufactured by HORIBA
Specifications
Inspection object | Particles on reticle/mask with or without pellicle |
Principle | Laser scattering method |
Detectable particle size | Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent) |
Inspection result | Data mapping display on the FPD |
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Utilities | |
Installation site | Clean room or clean booth, class 100 or better |
Temperature | 23 ±1°C |
Power | 100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase |