Compact Reticle/Mask Particle Detection System PR-PD3

Low running costs thanks to a compact design, plus remarkable versatility

PR-PD5 Particle detection system

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

LA-350 photo

The compact LA-350 uses Mie scattering (laser diffraction) to measure particle size quickly and easily. The speed and ease of this technique makes it popular for most particle sizing applications

 

PR-PD2HR Particle detection system

Achieves dramatic cost reductions in advanced mask inspections

HORIBA's PR-PD2 Particle Detection System

High sensitive particle detection down to 0.35µm.

Immersion Pro Probe

A range of fiber optic coupled Raman probe heads for remote analysis. Suitable for immersion and high temperature/pressure conditions.

T64000

HORIBA Scientific’s triple grating Raman spectrometers offer the ultimate in spectroscopic performance, and are ideally suited for fundamental research and advanced application of chemical analysis using Raman spectroscopy.

XGT-7200

Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.

XploRA PLUS Raman Microscope

The simplicity and power of the XploRA PLUS Raman microscope is unmatched and with a broad range of options, the system provides HORIBA’s best Raman microscope to date for multi-sample and multi-user environments.