Automatic pressure regulators

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Exhaust pressure controller image

The EC-5000 series exhaust pressure controller can maintain a consistent pressure...

Compact baking system suitable for a range of liquid source delivery applications.

UR-Z700

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Featuring the world's first sensor with a unique cooling method, the LF-F and LV-F series can measure and control chemicals which can not be measured by thermal sensors which heat the liquid.

VC liquid source delivery system

The compact vaporization system (VC series) does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

SEC-8000F/D series

Digital mass flow controller for high temperature environments

LU-A1000 liquid refill system image.

The LU series automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.

TL series vaporizer

The TL series enables large flow stable vaporization of liquid sources at atmospheric pressure.