Large Flow Liquid Source Vaporization Control System
A high-flow, high-efficiency, liquid vaporizer with flow channels and heater elements embedded in a cast aluminium block which ensures maximum heat transfer, and the elimination of both cold spots and the risk of condensation. This Liquid Source Vaporization Control System can operate at up to 300 °C and can vaporize up to 30g/min of IPA (or equivalent).
| Application liquid | H2O/IPA/TEOS/SiCl4 Please contact HORIBA if you require vaporizing any liquid materials that are not listed here. |
| Maximum vaporization volume (gas flow rate) | H2O : 10g/min (12.4 SLM) IPA ： 30g/min (11.1 SLM） TEOS : 50g/min（5.3 SLM） SiCl4 ： 130g/min（17.1 SLM） |
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