High Precision, High Stability Chemical Concentration Monitor

Resumo

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

Caracteristicas

Suitable for controlling individual constituents of commercial chemistries.
  • Monitoring max 8 components with real time and high performance
  • No reagents required and zero sample consumption for reduced CoO (Cost of Ownership)
  • Simple Plug and Play installation

Manufactured by HORIBA Advanced Techno

Especificações

Measurement Range and Repeatability

Unit : mass%

Component

Measurable range

Repeatability

1st solution

HNO3

30.0 - 34.0

±0.5

HF

2.00 - 4.00

±0.10

H3PO4

35.0 - 39.0

±0.6

H2SiF6

0.00 - 3.00

±0.50

H2O

25.0 - 33.0

±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

 

item

CS-100

CS-700

Measurement principle

Absorption spectroscopic method

Absorption spectroscopic method

Sample temperature

20 to 30 Degree C

20 to 30 Degree C

Ambient temperature

20 to 25 Degree C

20 to 30 Degree C

Components

Max. 4 components

Max. 8 components

Chemical range

Max. 4 ranges

Max. 6 ranges

Communication

Parallel I/O, Analog output, RS-232C

Parallel I/O, Analog output, RS-232C

Analog output
(4-20 mA)

Max. 2 components

Max. 6 components

Dimension

205(W) X 329(D) X 269(H)mm

218(W) X 391(D) X 213(H)mm

Power source

DC 24V

DC 24V(Same connecter of CS-100)

Consumable parts

Halogen lamp

Halogen lamp (Same as CS-100 type)

Wavelength

UV/NIR

UV/NIR

Wetted material

PTFE, PFA, Sapphire or Quartz,

PTFE, PFA, Sapphire,
Kalrez 4079 O-ring

 

 

Diagramas

CS-700 Schematics

Aplicacões

  • Cleaning and etching processes in semiconductor manufacturing

Baixar

  • Technical Article

Industrial In-line and Multi Component Monitor Using Absorption Spectroscopy and Its Application (1.6MB)

Abstract
"Chemical concentration monitor, HORIBA CS series, is widely used in semiconductor wet process. Its measurement principle, Ultra Violet (UV) and Near Infrared (NIR) absorption spectroscopy, enables in-line and real-time monitoring for multiple component chemistry. Measuring various kinds of samples is achieved, such as Fe ion concentration in HCl, more than 5 component chemistry including by-product from etching, to H2O2 in CMP slurry. In this paper, measurement results for those samples are introduced."