Piezo Actuator Valve PV Series

Resumo

The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. Combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) to create a pressure control or flow rate control system.

Caracteristicas

  • Ultraclean
    All metal construction
  • Wide flow range: from 1 CCM to 50 LM
  • High temperature models are available (PV-1000S/2000S)
  • Pressure control from an external unit

Manufactured by HORIBA STEC

Especificações

PV-1000

 

Flow Range

1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)

Flow Control Range

2 -100% F.S.

Valve Type

normally open / close

Input Signal

0 - 5VDC

Responce

less than 0.5 sec.

Operating Temperature

0 - 50 °C

Operating Diffential Pressure

MAX. 300 kPa(a)(max,42psi)

Pressure Resistance

1MPa

Leak Integrity

5×10-12Pa•m3(He)

 

PV-2000

 

Flow Range

10/20 LM

Flow Control Range

2 -100% F.S.

Valve Type

normally open / close

Input Signal

0 - 5VDC

Responce

less than 0.5 sec.

Operating Temperature

0 - 50 °C

Operating Diffential Pressure

MAX. 300 kPa(a)(max,42psi)

Pressure Resistance

1MPa

Leak Integrity

5×10-12Pa•m3(He)

 

 

Diagramas

Dimensions of PV Series