Semiconductor wet process monitor, CS-100F1 Series image

Inline multi-monitoring. Support for multi-bath, single-bath, and single wafer cleaning system.

Standard Clean 1 (SC-1) chemical concentration monitor image

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.

CS Series Monitors

High-speed response and compact profile make the TMAH/H2O2 Solution Concentration Monitor the ideal choice for wafer and batch type cleaning devices

SPM Monitor image

High-speed response and compact profile make the SPM Solution Concentration Monitor the ideal choice for water and batch type cleaning devices

FPM Monitor / CS-153

24-hour real-time monitoring of FPM solution concentrations in semiconductor wet-etching processes

CS-153N HF/HNO3 Monitor

24-hour real-time monitoring of HF/HNO3 solution concentrations in semiconductor wet-etching processes

BHF monitor image

The CS-137 offers reliable, unobtrusive round the clock, real-time monitoring of BHF solution concentrations primarily used for wet etching in semiconductor processes.

Appearance of CS-152, SC-2 monitor

High-speed response and compact profile make the SC-2 Solution Concentration Monitor the ideal choice for wafer and batch-type cleaning devices

Indication Converter HF-960H

[New]

Ideal for measuring high concentrations of hydrofluoric acid, hydrochloric acid, etc.

Indication Converter HE-960H-TM

[New]

Ideal for management of TMAH concentration in developer solution

Carbon Sensor Resistivity Meter HE-960R-GC

Applicable to Single-Bath Cleaning systems Glass Carbon Sensor offers superior Resistance to Chemicals

 

Carbon Sensor Resistivity Meter HE-960RW-GC

Simultaneous Measurement and Simultaneous Output of Resistivity in 2 Locations Employs Chemical-Resistant Sensor

HP-480 the industrial ph meter

The HP-480 industrial pH meter is a standard type pH meter that mainly includes frequently used functions.

Conductivity Meter High Concentration Type HE-480H

The HE-480H industrial conductivity meter is a high-concentration conductivity meter with a wide measurement range.