Airborne Molecular Contamination Control Technology in the Semiconductor Industry

*Manager of Engineering Department of Dan-Takuma Technologies Inc. also Head of Keihanna Research Institute

Dan-Takuma Technologies Inc. will begin to sell a continuous trace analyzer for monitoring Airborne Molecular Contamination (AMC). This DT Analyzer will be produced for the semiconductor industry as a part of the AMC control technology under contract with the HORIBA Group. This paper is an outline of AMC control technology including AMC measurement in the air inside a clean room.

(Same content in Japanese is in Readout No.31-Japanese edition-.)

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