化学药液浓度计 CS-700

概要

HORIBA CS-700系列的化学药液浓度计拥有更好的性能去监测混酸中的各个成分,包括高精尖端半导体制程中所需的各种化学药液。通过改进HORIBA知名的光谱分析测量法,CS-700系列实现了5倍的监测性能提升。提高质量控制能有效改进半导体工艺流程。

特征

  • 监测至多8种成分,实现实时高性能监测
  • 无需中和液消耗,0样本消耗,减少使用者成本
  • 即插即用,便携安装

制造: HORIBA Advanced Techno

規格

Measurement Range and Repeatability

Unit : mass%

Component

Measurable range

Repeatability

1st solution

HNO3

30.0 - 34.0

±0.5

HF

2.00 - 4.00

±0.10

H3PO4

35.0 - 39.0

±0.6

H2SiF6

0.00 - 3.00

±0.50

H2O

25.0 - 33.0

±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

item

CS-100

CS-700

Measurement principle

Absorption spectroscopic method

Absorption spectroscopic method

Sample temperature

20 to 30 Degree C

20 to 30 Degree C

Ambient temperature

20 to 25 Degree C

20 to 30 Degree C

Components

Max. 4 components

Max. 8 components

Chemical range

Max. 4 ranges

Max. 6 ranges

Communication

Parallel I/O, Analog output, RS-232C

Parallel I/O, Analog output, RS-232C

Analog output
(4-20 mA)

Max. 2 components

Max. 6 components

Dimension

205(W) X 329(D) X 269(H)mm

218(W) X 391(D) X 213(H)mm

Power source

DC 24V

DC 24V(Same connecter of CS-100)

Consumable parts

Halogen lamp

Halogen lamp (Same as CS-100 type)

Wavelength

UV/NIR

UV/NIR

Wetted material

PTFE, PFA, Sapphire or Quartz,

PTFE, PFA, Sapphire,
Kalrez 4079 O-ring

产品相关图及其它

化学药液浓度计 CS-700