Fiber Optic Type Chemical Concentration Monitor CS-100F1

Přehled

Real-time concentration monitoring is made possible by an inline cell that directly integrates into the main piping of the cleaning system. Emphasizing stability, a cell unit type is also available that uses monitor output for feedback control. This keeps chemical solution concentrations within the permissible range and eliminates unnecessary solution changes.

Funkce

  • Concentration follow-up in real-time using in-line cells.
  • Cell unit type for higher accuracy
  • Safe installation by complete isolation of electrical and measurement sections

Vyrobeno HORIBA

Specifikace

Model

CS-151F1

CS-152F1

CS-150F1

Target of measurement

SC-1

(ammonia/hydrogen peroxide aqueous solution)

SC-2

(hydrochloric acid/hydrogen peroxide aqueous solution)

SPM

(sulfuric acid/hydrogen peroxide aqueous solution)

Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.

Measurement principle

Absorption spectrometry

Concentration computation principle

Temperature-compensated multivariate analysis

Measurement range

(mass %)

 

NH3 : 0.00% to 1.00%

H2O2 : 0.00% to 5.00%

H2O : 94.0% to 100.0%

HCI : 0.00% to 2.00%

H2O2 : 0.00% to 2.00%

H2O : 96.0% to 100.0%

H2SO4 : 70.0% to 96.0%

H2O2 : 0.00% to 10.00%

H2O : 4.0% to 30.0%

Repeatability (mass %)

(within ±1% room temperature)

 

NH3 : ±0.15%

H2O2 : ±0.30%

H2O : ±1.5%

HCI : ±0.15%

H2O2 : ±0.15 %

H2O : ±1.5%

H2SO4 : ±0.50%

H2O2 : ±0.50%

H2O : ±1.5%

Sample solution temperature

20 to 80 : (when using Inline cell)  20 to 30 : (when using cell unit)

Measurement cycle

Approx. 3 seconds

Content of

• 1st component: measured concentration value (%)

• Error code

 

LCD and input

 

 

• 2nd component: measured concentration value (%)

• 3nd component: measured concentration value (%)

• 1st and 2nd components: concentration alarm status

• Parallel concentration alarm output invalid status

• Serial/parallel status

• Background compensation data

 

 

 

RS-232C serial input

• Serial/parallel status switching

• Measurement data transfer request

• 1st and 2nd component concentration alarm setting

• Parallel concentration alarm output status

(valid/invalid)

• Target measurement solution switching

 

 

 

Parallel input

12 to 30 V DC (photocoupler insulated)

• Parallel concentration alarm output

• Target measurement solution switching

• Background compensation

 

 

 

Parallel output

Open collector output (photocoupler insulated)

Max. current when on:

DC 5 mA (no internal protection resistor)

Max. ignition voltage when off: 30 V DC

 

 

• 1st component concentration alarm, 4 types

• 2nd component concentration alarm, 4 types

• Device error

• Measuring

• Target measurement solution type

• Background compensation status

 

 

 

Solution temperature input

Terminal block connection (M3 terminal screws)
• Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)

Analog output

• 1st component concentration alarm, 4 types: 4 to 20 mA

• 2nd component concentration alarm, 4 types: 4 to 20 mA

* We also support other measurement ranges. Please specify when ordering.

Fiber optic cable

Dedicated CS-100F1 Series fiber optic cable

(25 ±15: installation temperature)

ample cell

We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.

Power supply

100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA

Dimensions

205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)

Weight

Approx. 11 kg

Analog output

4 to 20 mA

(2 outputs: H2SO4: 50.0 to 100.0 %/H2O: 0.00 to 10.00 %)

The analog output can be prepared to correspond to each

requirement by users. (Please specify when ordering.)

Power

24 V DC ±10%, 2 A

Dimensions

205 (W) x 329 (D) x 269 (H) mm

8.1 (W) x 13 (D) x 10.6 (H) in

291 (W) x 329 (D) x 269 (H) mm

11.5 (W) x 13 (D) x 10.6 (H) in

Mass

Approx. 11 kg

Approx. 12 kg

Connection pipe size

For inlet and outlet: Outer diameter 6 mm (inner diameter 4 mm)

Pipe connection

Nippon Pillar Super type

Schémata

Dimension of CS-100F1

Žádosti

  • Cleaning and etching processes in semiconductor manufacturing

Ke stažení

  • Technical Article

Industrial In-line and Multi Component Monitor Using Absorption Spectroscopy and Its Application (1.6MB)

Abstract
"Chemical concentration monitor, HORIBA CS series, is widely used in semiconductor wet process. Its measurement principle, Ultra Violet (UV) and Near Infrared (NIR) absorption spectroscopy, enables in-line and real-time monitoring for multiple component chemistry. Measuring various kinds of samples is achieved, such as Fe ion concentration in HCl, more than 5 component chemistry including by-product from etching, to H2O2 in CMP slurry. In this paper, measurement results for those samples are introduced."