HF / HCl Concentration Monitor HF-960H

Přehled

Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.

Funkce

  • Measurement range : 0 - 10 %
  • Automatic display range switching
  • Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
  • 24 V DC power supply
  • RoHS compliant

Vyrobeno HORIBA Advanced Techno

Specifikace

Model

HF-960H

Measurement range

HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm

Power supply

24 V DC ±10%, 10 W (max.)

Protective structure

Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)

Mass

Approx. 550 g

Conforming standards

CE marking, FCC Part 15

Compatible sensors

FES-510 Series (flow-type carbon sensor)

Schémata

Dimensions of HF-960H

Ke stažení

  • Technical Article

Conductivity Meter with Carbon Electrodes and Application for Densitometers Technologies for a Practical Densitometer (1.8MB)

Abstract
"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."

Související produkty

Low Concentration HF/HCl/NH3 Monitor HF-960M

High precision, high-speed measurement of low concentrations of HF, HCl, and NH3. Resistance sensor.