Veranstaltungs Daten: 20. März 2012 - 22. März 2012

Ort: Shanghai, China

HORIBA - Your Trusted Technology Partner

Realize your optimal manufacturing process and improve your Overall Equipment
Efficiency with world-class analysis, monitoring, and control technology from
HORIBA - the company you can trust to adapt to your needs and always be there
to provide expertise and support today, tomorrow, and into the future.

• Products

• Pressure Insensitive Mass Flow Controller  SEC-Z700X series
• Digital Mass Flow Controller  SEC-Z500X series
• Digital Auto Pressure regulator  UR-Z700 series
• Digital Liquid Mass Flow Meter/Controller  LF-F/LV-F series
• Mixed Injection  MI/MV series
• Direct Injection  VC series
• Residual Gas Analyzer  MICROPOLE System
• Plasma Diagnosis End-point Monitor  EV-140C
• Raman Spectroscopy System LabRAM HR-800
• Glow Discharge Optical Emission Spectroscppy GD-Profiler 2

• Fiber Type Chemical Solution Monitor  CS-121F1
• Multi-point Chemical Solution Monitor  CS-100F4
• Fiber Type Chemical Solution Monitor  CS-100F1
• Low-concentration Type HF/HCI/NH3 Concentration Monitor  HF-960M
• High-concentration Type Carbon Sensor Conductivity Meter  HE-960HC
• Low-concentration Type Carbon Sensor Conductivity Meter  HE-480-GC
• TMAH Concentration Monitor  HE-960H-TM
• High-concentration Type HF/HCI Monitor HF-960H
• High Sensitive HF Concentration Monitor  HF-700
• 2-Channel Resistivity Meter  HE-960RW-GC

• Reticle/Mask Particle Detection Systems  PR-PD series
• Reticle/Mask Particle Blower RP-1

• Chemical Solution Concentration Monitor  CS-100 series
• Digital Mass Flow Controller  SEC-N100 series
• Residual Gas Analyzer  MICROPOLE System

• Vapor Consentration Monitor IR-300

■HORIBA Booth