
Dünne Schichten
Ellipsometry Application Notes
Spectroscopic ellipsometers are the perfect tools for measuring thin film thickness and optical constants (n and k) with high accuracy for single and multiple layer thin film structures. Thickness determinations range from a few angstroms to tens of microns. Characterization of advanced material properties are also possible such as: anisotropic structures, graded and non-uniform layers, alloy composition.
General overview
Semiconductor
Optical Characterization of Organic Semiconductors by Spectroscopic Ellipsometry
High k Dielectric with Nanoscale Thickness Studied by VUV spectroscopic Ellipsometry & FTIR-ATR
Characterization of III-V Semiconductors using Phase Modulated Spectroscopic Ellipsometry
Spectroscopic Ellipsometry of Compound Semiconductors: AlxGa1-xN / GaN Hetero-Structures
Ferroelectric Thin Films Characterization by Spectroscopic Ellipsometry PbZr1-xTixO3 & BA1-xSrxTiO3
Flat Panel Displays
Characterisation of LED Thin Film Devices by Spectroscopic Ellipsometry
Photovoltaic
Characterization of Photovoltaic Devices by Spectroscopic Ellipsometry
P3HT:PCBM Bulk Heterojunction Solar Cells Characterization by Spectroscopic Ellipsometry
Optical Coatings
Characterization of Chalcogenide Glasses
Characterization of ZrO2 Thin Films on Glass Substrates
Characterization of TiO2 Thin Films and Multilayer Antireflective Coatings
Spectroscopic Ellipsometry study of ZnO thin films
Characterization of Electrochromic Devices by Spectroscopic Ellipsometry
Optoelectronic
Characterisation of LED Thin Film Devices by Spectroscopic Ellipsometry
Biology
Characterization of DNA Sensor Pads using the UVISEL Spectroscopic Phase Modulated Ellipsometer
Spectroscopic Ellipsometric Measurements on Biochip Structures in a Liquid Flow Cell Environment
Characterization of biotin-avidin system for use of biomaterials by Spectroscopic Ellipsometry
Characterization of thickness and optical constants of a-Carbon films
Packaging
Characterization of barrier layers by Spectroscopic Ellipsometry for packaging applications
Data Storage
Characterization of GeSbTe films by Spectroscopic Ellipsometry for Rewritable Optical Discs
