Liquid Auto Refill System LU Series

Übersicht

The LU Series can offer uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems, increasing uptime and reducing operator handling and risk of process contamination.

Includes a function for automatically implementing a remaining liquid purge sequence. Maintenance efficiency and product throughput have also been improved with the LU Series.

Merkmale

  • Vapour pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard.
  • A load cell monitoring the remaining amount of material in the mother tank is available as an option.
  • Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings, with the added advantage of easy component replacement during routine maintenance.
  • Degasifier module comes as standard reducing the risk bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications.
  • Safety standards: SEMI S2/S8/S14, CE mark.
  • Improved safety: A variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur.
  • Improved operability: Operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.




Hergestellt von HORIBA STEC

Spezifikationen

Model

LU-A1000 series

Liquids supported

TEOS, TMOB, TMOP, TEOP, BTBAS

Supply method

Pressure movement from He gas

Gas supply pressure

For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G)

Tank

Maximum 5-gallon container can be attached (outside of production range)

Operation

Automatic supply/stop using external signal from supply system

Operation area display details

Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.

Gas connection

Refer to basic flow

Power source

AC 100 to 240 V, 50/60 Hz, 300 VA

Electricity connection

AC 100 to 240 V breaker connection, signal receptacle

External dimensions

See external dimensions diagram

* Please make decisions regarding the specifications above after meeting with STEC.

Diagramme

Dimensions of LU-A1000 Series
System Examples of LU-A1000 Series
Flow Schematic of LU-A1000 Series