GAS FLOW MEASUREMENT / CONTROL
As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and new materials are being introduced into the wafer production process to increase production efficiency.
HORIBASTEC is the recognized leader in mass flow technology, performing extensive research and development bringing the world’s first digital mfc, compact mfc, and more recently, wide range and pressure insensitive mfcs to market. High temperature mfcs are also available that can operate up to 120˚C. Mass flow controllers can control flows up to 200slm with different interfaces including analog, RS 422A, RS-485, DeviceNet.
Programmable high performance mass flow controller
High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.
Evolved thermal technology derived from the most reliable and accurate digital flow controllers.
Digital mass flow controller for high temperature environments
A best-seller mass flow controller for high temperature environments
Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.
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