Large Flow Liquid Source Vaporization Control System LE Series

Übersicht

A high-flow high-efficiency liquid vaporizer with flow channels and heater elements embedded in a cast aluminium block to ensure maximum heat transfer and the elimination of cold spots / condensation risk. Can operate up to 300 deg C. and vaporize up to 30g/min of IPA (or equivalent). 

Merkmale

  • Innovative design maximizes vaporization rate
  • New injector nozzle ensures consistent liquid injection which contributes to stable vapor output concentration
  • All stainless steel, fully swept flow path for maximum corrosion resistance and minimum particulate generation
  • Compatible with many types of precursors materials

Hergestellt von HORIBA STEC

Spezifikationen

Application liquid

H2O/IPA/TEOS/SiCl4

Please contact HORIBA if you require vaporizing any liquid materials that are not listed here.

Maximum vaporization volume (gas flow rate)

H2O : 10g/min (12.4 SLM)
IPA : 30g/min (11.1 SLM)
TEOS : 50g/min(5.3 SLM)
SiCl4 : 130g/min(17.1 SLM)