Massendurchflussregler und Messgeräte

HORIBA bietet eine breite Palette von Massendurchflussreglern und Massendurchflussmessgeräten (MFC & MFM) für Ihre Anforderungen an; Alle unsere Produkte bieten hohe Genauigkeit und eine schnelle Reaktionszeit. Mit unseren verschiedenen Modellen von Gasdurchflussmessern und Gasflussreglern können Sie die für Sie am besten geeigneten auswählen. Wir bieten drei Arten von Ventilen, können Sie aus thermischen, Solenoid oder Piezo. Wir haben auch verschiedene Kommunikationsarten wie Analog-, Digital-, DeviceNet ™, PROFIBUS ™ und EtherCAT® (*) (je nach Produktmodell). Unsere große Durchflussmenge reicht von Mikro zu groß.

* Devicenet ist ein Warenzeichen der Open DeviceNet Vender Association.
   PROFIBUS ist eine Marke von PROFIBUS International.
   EtherCAT ist ein Warenzeichen der Beckhoff Automation GmbH, Deutschland.


Erfahren Sie mehr über Massendurchflussregler hier.
Erfahren Sie mehr über die Eigenschaften eines digitalen Massendurchflussregler hier.
Erfahren Sie mehr über HORIBAs KRITERIUMS D500 Digitale Massendurchfluss  Modul hier.

Oberer Bereich

Pressure Insensitive Mass Flow Module D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

Klasse führende Leistung

Pressure Insensitive Mass Flow Controller  SEC-Z700X

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.

Meistverkauft

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Allgemeiner Zweck (Digital/analoge Kommunikations)

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

R100 Mass Flow Controller

Digital Mass Flow controller focuses on non-semiconductor applications. Has digital (PROFIBUS) /analog communications, 24 VDC power supply, high accuracy +/- 1.0% S.P. with high performance Solenoid Valve, and Multi Gas/Multi Range function for the nine most popular gases used in the applications

Allgemeiner Zweck (analoge Kommunikations)

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Mass Flow Controller SEC-400 Series

The economy mass flow controller installed with thermal valve.

Hohe Temperatur

High Temperature Digital Mass Flow Controller SEC-8000 F/D Series

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.

Accessories

multi-function control unit

This multi-function control unit is equipped with a program setting function, preset function, and integrating function. The front panel simplifies operation.

PE-D10-20

The PE-D20 control unit integrates high frequency functions via the front panel controls.

PE-D10-20

The PE-D10 is a standalone unit for use with mass flow meters.

PE-series

The PE series of dedicated power sources can be used as drive power sources for mass flow controllers, meters, and auto pressure regulator as well as for dedicated display units, and supply the standard flow rate setting voltage. The series includes a lineup of models that have flow rate alarm output function, models offering 0 signals and 4 to 20mA, and models that are capable of driving up to six units.

Display unit DU series

The DU-102E and DU-103K display the flow rate output signal from mass flow controllers and meters. Matching these units to the full-scale flow rate values of mass flow controllers and meters enables direct monitoring of control and measured flow rates.

MFT20 mass flow controller tester image

The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.

* Devicenet is a trademark of Open DeviceNet Vender Association.
   PROFIBUS is a trademark of PROFIBUS International.
   EtherCAT is a trademark of Beckhoff Automation GmbH, Germany.