Gas Control/Analysis (Dry Process)
Suitable for semiconductor and FPD processes. The compact design makes it easy to maneuver, allowing it to be used for a wide range of applications. New line of single and dual cell gas analyzers
The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...
Compact baking system suitable for a range of liquid source delivery applications.
The compact vaporization system (VC series) does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.
The LU series automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.
A best-seller mass flow controller for high temperature environments
The MI/MV series can efficiently vaporize liquids using a gas-liquid mixture that allows for complete vaporization, this in a unit not much larger than a mass flow controller.