Blanks Mask Particle Detection System PR-PD2BLI
Overview
The PR-PD2BLI enables fine particle detection down to 0.1μm and also boasts a multi-stage sorter plus full range of communication functions. High-throughput measurement is possible on blanks mask.
Features
- High sensivity and high throughput
0.1μm/5.5 min (142mm)
0.15μm/2.75 min (142mm)
0.2μm/33 sec (142mm) - Multi-loader/unloader correspondence
Manufactured by HORIBA
Specifications
Please contact us.
Applications
- Measurement of particles on masks and reticle blanks in lithography process.
- In-coming QA inspection and Routine inspection