Capacitance Manometer VG Series
Overview
Compact and all metal capacitance manometer which has self temperature adjustment type
Features
- Compact self heating design
- High performance and high stability resulting from innovative electrode structure
- Excellent corrosion resistance with Ni alloy diaphragm
- Set point output (2 points)
- Alarm output
- Range adjustment by dedicated software
- ONE PUSH ReZero
- Power requirements +/-15VDC or 24VDC
- CE & RoHS compliant
Manufactured by HORIBA STEC
Specifications
Model | VG-200 | |
|---|---|---|
Full Scale Range | 133.32Pa | 1.3332kPa/13.332kPa/133.32kPa |
Sensor Controled Temperature | 55°C/100°C | |
Accuracy Including non-linearity, hysteresis, non-repeatability * | 0.5%R.S. | 0.25%R.S. |
Resolution | 0.03%F.S | 0.01%F.S |
Zero Temp. Coefficient | 0.005%F.S./°C | 0.0025%F.S./°C |
Span Temp. Coefficient | 0.03%R.S./°C | 0.02%R.S./°C |
Operating Temperature | 10°C to 45°C(55°C),10°C to 50°C(100°C) | |
Response time | <60msec | |
Warm Up time | 60min(55°C),120min(100°C) | |
Proof Pressure | 350kPa(A) | |
Output | Analog 0-10V, load resistance: 10kΩ or more | |
Supply Voltage | ±15VDC ±5% or 24VDC±5% @0.6Amax | |
Setpoint | Contact form: 1a,1b, Number of setpoint: 2 Current charge capacity: 0.1A @30VDC | |
* Including non-linearity, hysteresis, non-repeatability at 25℃ ambient temperature after 2hours operation.
Type / Specification
1. Full scale | 2. Heater set temperature | 3. Fitting | |
|---|---|---|---|
VG-221 | 10T：133.32Pa 11T : 1.3332kPa(10Torr) 12T : 13.332kPa(100Torr) 13T : 133.32kPa(1000Torr) | 055 : 55°C | KF16 : KF16 |
● Please choose full scale,heater set temperature and fitting. ● Please contact us If you need alarm initial setting.
Applications
- Vacuum dry chamber
LIB(Lithium ion battery electrode), FPD(Flat panel display)
Chamber vacuum monitoring after solvent applying. - Vacuum heating furnace
Process optimization, enhance process yield. - Freeze dry chamber
Optimize quality control in freezing dry process of medicine and food.
Downloads
- Technical Article
Development of Capacitance Diaphragm Gauge (1.3MB)
Abstract
"In the deposition process or an etching process that made to be used for the fabrication of LEDs, semiconductors, FPDs and solar cells, various gases are used and the process pressure gives large effect on product quality, so the excellent corrosion resistance, and without gas dependent, and high accuracy are required to vacuum gauge . To provide solutions to these requests, HORIBA STEC has developed the Capacitance Diaphragm Gauge “VG-200 Series”, and the results of the performance evaluation were superior reproducibility and long term stability. Here, we describe the product features and performance evaluation results of the VG-200."