Fiber Optic Type Chemical Concentration Monitor CS-600F
Overview
The CS-600F achieves a higher level of functionality best suited for manufacturing, such as the ability to perform in-line measurement of high temperature chemical solutions in various applications, stable operation for reduced downtime, and compact size for improved space productivity in order to meet the precise chemical solution concentration management required in leading-edge semiconductor wet process.
Features
- Reduced Sizes for More Flexible Layout
The CS-600F monitor is compact in size; height has been reduced by 36%, volume by 40%, and the space required by the cell cables by 46% compared to previous models (CS-100F1 series).
The light source unit and monitor main body can be installed remotely and in separate locations, which allows installation flexibility based on the locations of chemical solution unit and cleaning equipment.
- High-stability, In-line Measurement of High Temperature Chemical Solutions (20 to 80℃)
The all-new optical system and improved processing algorithms enable in-line measurement of high temperature chemical solutions, a critical step for leading-edge wet processes. This eliminates the need to cool-down the chemical sample., HORIBA’s CS-600F provides a high-stability, enables more efficient and precise chemical solution management.
- Significantly Reduced Background Correction Frequency
The regular correction frequency is significantly reduced compared to the previous model (CS-100F1 Series), which in turn significantly reduces unit downtime and greatly contributes to improved throughput.
- A Single Monitor is Capable of Measuring Up to Six Types of Chemical Solutions (solution types or ranges)
A single monitor can measure up to six types of chemical solutions (solution types or ranges). Solution types and ranges can be freely specified, enabling the CS-600F to meet a wide variety of monitoring requirements.
- Capable of Outputting Measured Values of Up to Six Components (Serial Output)
The previous model (CS-100F1 Series) was able to output four components (serial output). This new model can output up to six components through the serial output. Analog output of new model is four components versus two on the previous model.
Manufactured by HORIBA Advanced Techno
Specifications
Model | CS-600F | ||
|---|---|---|---|
Measurement | Absorption spectroscopic method | ||
Calculation | Temperature compensation type multivariate analysis | ||
Measurement target | NH3/H2O2/H2O (reperesentative specification) | ||
Measurement range | NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、 | ||
Repeatability | NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass% | ||
Sample solution | 20〜80℃ | ||
Measurement cycle | Approx. 3 seconds | ||
LCD | (1) Measured value (%) | ||
Key input | (1) Concentration alarm setting (HH/H/L/LL) | ||
Parallel | Input voltage of 12 V to 30 V DC by insulating with photo coupler | ||
Parallel | Transistor output (NPN open collector) by insulating with photo coupler | ||
Serial input | RS-232C | ||
Serial | RS-232C | ||
Analog | 4 mA to 20 mA | ||
Chemical solution | Terminal block inlet (terminal screw M3) | ||
Air | Connection port: 4 mm O.D. quick joint, | ||
Power source | 100～230V AC（Single-Phase）、50/60Hz | ||
Power consumption | Approx. 85 VA | ||
Weight | (Monitor) Approx. 3.6 kg | ||
Ambient temperature | (Monitor, Lamp unit) 20°C to 30°C | ||
Ambient humidity | (Monitor, Lamp unit, Sample cell) 40% to 70% | ||
Slanting angle at installation | (Monitor, Lamp unit) within ±1° | ||
Optical fiber | Length: 5 m, minimum bend radius: R 150 mm | ||
Schematics
Applications
- Cleaning and etching processes in semiconductor manufacturing
Downloads
- Technical Article
Industrial In-line and Multi Component Monitor Using Absorption Spectroscopy and Its Application (1.6MB)
Abstract
"Chemical concentration monitor, HORIBA CS series, is widely used in semiconductor wet process. Its measurement principle, Ultra Violet (UV) and Near Infrared (NIR) absorption spectroscopy, enables in-line and real-time monitoring for multiple component chemistry. Measuring various kinds of samples is achieved, such as Fe ion concentration in HCl, more than 5 component chemistry including by-product from etching, to H2O2 in CMP slurry. In this paper, measurement results for those samples are introduced."
Resources
- Installation example
The CS-600F monitor is compact in size; height has been reduced by 36%, volume by 40%, and the space required by the cell cables by 46% compared to previous models (CS-100F1 series).
The light source unit and monitor main body can be installed remotely and in separate locations, which allows installation flexibility based on the locations of chemical solution unit and cleaning equipment.
Measurement date of high-stability in-line measurement of high temperature chemical solutions (20 to 80℃)
The all-new optical system and improved processing algorithms enable in-line measurement of high temperature chemical solutions, a critical step for leading-edge wet processes. This eliminates the need to cool-down the chemical sample., HORIBA’s CS-600F provides a high-stability, enables more efficient and precise chemical solution management.
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