SEC-E Series

Mass Flow Controller SEC-E Series

Mass Flow Controller

This general purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller sec-e series can be used in a wide range of industries.

Gas flow through the mass flow controller can be controlled over a range of flows: from 10 SCCM to 200 SLM.

View our MFC comparison chart here.

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Equipped with a reliable thermal sensor and solenoid valve
  • Wide range of flow rate control: from 10 SCCM to 200 SLM (N2)
  • Suitable for a wide range of applications
  • Integration into various manufacturing systems, including those for: LCDs, photovoltaic cells, power semiconductors, coatings
    • General industries: control of burner gases, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume
    • Research & Development: equipment for performance evaluation of various gas sensors, and combustors; biotechnology-related evaluation
    • Laboratories: gas flow controllers for various experiments, sampling gases, etc.

 

 

Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Product accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
MoreDedicated power sources PE Series
Display unit DU series
MoreDisplay unit DU series
Mass Flow Checker MFT-20
MoreMass Flow Checker MFT-20
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
SU-503ED/502EA
MoreSU-503ED/502EA

Related products

SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z500X
MoreSEC-Z500X
Multi Range/Multi Gas Digital Mass Flow Controller
VG Series
MoreVG Series
Capacitance Manometer
CRITERION D500
MoreCRITERION D500
Pressure Insensitive Mass Flow Module
CVS-ONE
MoreCVS-ONE
Constant Volume Sampler
EXFM-ONE
MoreEXFM-ONE
Ultrasonic Exhaust Flow Meter
FDM Series
MoreFDM Series
POCl3 Auto Refill System
LE Series
MoreLE Series
Large Flow Liquid Source Vaporization Control System
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
LSC series
MoreLSC series
Compact Baking System
LU Series
MoreLU Series
Liquid Auto Refill System
MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
MV-2000 Series
MoreMV-2000 Series
Mixed Injection System Liquid Vaporizer
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z500X
MoreSEC-Z500X
Multi Range/Multi Gas Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller
VC Series
MoreVC Series
Direct Liquid Injection System
XF-100 Series
MoreXF-100 Series
Digital Liquid Mass Flow Meters
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z500X
MoreSEC-Z500X
Multi Range/Multi Gas Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller