GAS FLOW MEASUREMENT / CONTROL

As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and new materials are being introduced into the wafer production process to increase production efficiency. 

HORIBASTEC is the recognized leader in mass flow technology, performing extensive research and development bringing the world’s first digital mfc, compact mfc, and more recently, wide range and pressure insensitive mfcs to market. High temperature mfcs are also available that can operate up to 120˚C. Mass flow controllers can control flows up to 200slm with different interfaces including analog, RS 422A, RS-485, DeviceNet.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Pressure Insensitive Mass Flow Module D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Mass Flow Controller SEC-400 Series

The economy mass flow controller installed with thermal valve.