Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

Digital Auto Pressure Regulator

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNetâ„¢ communications.

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

Exhaust Pressure Controller EC-5000 Series

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

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