Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

Pressure Insensitive Mass Flow Module D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

High Temperature Digital Mass Flow Controller SEC-8000 F/D Series

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.