Pressure Insensitive Mass Flow Module CRITERION D500

Vue d'ensemble

The leading-edge Pressure Insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. The CRITERION D500 has all performance for the advanced semiconductor manufacturing process; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

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Fonctions

  • Pressure Insensitive Performance
    A new high-performance Pressure Insensitive function provides for simplified gas supply systems
  • Multi-range,multi-gas,multi-pressure solution
    The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range
  • G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function
    The advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput
  • High Accuracy
    Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment
  • Fast Response
    Response: < 0.8 second
    Accurate, stable flow control has been realized
  • Dynamic Range
    Wide control range: 0.2% F.S. to 100% F.S.

Pressure Insensitive Mass Flow Module CRITERION D500

About structure & performance of  CRITERION


Fabriqué par HORIBA STEC

Schémas

Dimensions of CRITERION D500

Applications

  • Leading-edge semiconductor manufacturing process

Téléchargements

  • Technical Article

Pressure-Based Mass Flow Control Module CRITERION D507 Series (1.7MB)

Abstract
"Recently, with the increase of application of a semiconductor device according to IoT, the latest semiconductor factories are focusing to minimize the downtime of the apparatus. Therefore, for the purpose of failure pre-detection of semiconductor tools and its components, the managed parameters of semiconductor process are increased, and its specification is getting tighter. In order to satisfy the required control criteria, the mass flow control module is required to have high-speed communication and failure pre-detecting function as well as flow rate accuracy and reproducibility, inlet pressure insensitivity performance. D507 series is lined up on D500 series to meet strict management at recent semiconductor factory."

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