Real Time Interferometric Process Monitor DIGILEM-CPM-Xe/Halogen

Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.Interference occurs when monochromatic light hits the sample surface, resulting in...

Real Time Interferometric Process Monitor LEM-CT-670-G50

Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.