We have launched our new product the TMAH conductivity meter HE-960TM for the semiconductor and liquid crystal processes.

1 December 2008


Ideal for management of TMAH concentration in developer solution
The HE-960TM accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions used in semiconductor and liquid crystal manufacturing processes. The FES-510 series of dedicated sensors offers a wide measurement range and outstanding chemical resistance, making it ideal for TMAH measurement.
Features a four-electrode carbon sensor with outstanding resistance to chemicals

 

Information concerning products for use outside of Japan is provided on the group-wide website operated by the HORIBA Group.
Please discover HORIBA Advanced Techno products on HORIBA Semiconductor Segment website!