Horiba Develops Gas Monitors for Semiconductors and LC Processing

3 December 2001


Horiba, Ltd. has developed the FG-100 series gas monitors solely for the measurement of greenhouse gases that are emitted during the production of semiconductors and liquid crystals (LCs). This marks the first development of such devices in Japan. The new gas monitors are the smallest in the industry and are highly mobile; they can be installed at production line checkpoints with ease. The FG-100 will contribute in the environmental, health, and safety areas of the semiconductor industry, which are becoming more important along with next-generation semiconductor processing technology.


Gas measurement during semiconductor and LC processing
Manufacturers have introduced devices to remove harmful gasses, including PFC gas. While the industry is switching to next-generation 300 mm semiconductor lines and expanding LC production line sizes, Horiba expects an increasing demand for “on-site measurement” – the monitoring of gasses on the production lines. Among many gas measurement principles, the FTIR* method is the standard for such gas measurement in the industry, for its measurement speed and ease of operation.
*FTIR= Fourier transformation infrared spectroscopy

About these products
The FG-100 series is designed exclusively for semiconductor and LC processing, with a compact size that reflects on-site measurement needs. These products use FTIR as a measurement principle. Horiba has made them the best devices for easy and fast on-site measurement by focusing on gas measurement as a purpose. As a company with 70% of its products used for environmental measurement, Horiba will be the only Japanese company to bring gas monitors for semiconductor and LC processing to the market.

References

Main Features
1. With the smallest size in the industry (about half that of existing types), the devices can easily be installed or moved. This is the only series developed by a Japanese manufacturer solely for gas analysis.
2. Five kinds of measurement cells are available for different levels of gas density of objects measured. These cells (with internal sample gases) can be easily exchanged according to gas density. The gas monitor analyzes different measurement points, from high to low densities, under optimal conditions.

Main Specifications
Measurement principle: Fourier transformation infrared (FTIR) spectroscopy
Dimensions: 450 (W)*400 (D)*350 (H) mm