CS-700

High Precision, High Stability Chemical Concentration Monitor CS-700

High Precision, High Stability Chemical Concentration Monitor

This is a chemical concentration monitor capable of accurately measuring the concentration of each component in mixed solutions used in the semiconductor manufacturing processes.

Ideal for controlling multi-component chemicals, including trademarked chemicals. It contributes to enhanced quality control in semiconductor manufacturing processes while improving the accuracy of chemical management.

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CMulti Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Compatible with multi-component chemicals

Accurate measure mixtures of up to eight components of chemicals can be taken.

Zero reagent requirements

Since component separation is accomplished through an optical measurement method without the need for reagents, it also contributes to cost reduction in the production process.

Measurement Range and Repeatability

Unit : mass%

 ComponentMeasurable rangeRepeatability
1st solutionHNO330.0 - 34.0±0.5
HF2.00 - 4.00±0.10
H3PO435.0 - 39.0±0.6
H2SiF60.00 - 3.00±0.50
H2O25.0 - 33.0±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

 

itemCS-100CS-700
Measurement principleAbsorption spectroscopic methodAbsorption spectroscopic method
Sample temperature20 to 30 Degree C20 to 30 Degree C
Ambient temperature20 to 25 Degree C20 to 30 Degree C
ComponentsMax. 4 componentsMax. 8 components
Chemical rangeMax. 4 rangesMax. 6 ranges
CommunicationParallel I/O, Analog output, RS-232CParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 componentsMax. 6 components
Dimension205(W) X 329(D) X 269(H)mm218(W) X 391(D) X 213(H)mm
Power sourceDC 24VDC 24V(Same connecter of CS-100)
Consumable partsHalogen lampHalogen lamp (Same as CS-100 type)
WavelengthUV/NIRUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz,PTFE, PFA, Sapphire,
Kalrez 4079 O-ring

Schematics

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

CombiScope
CombiScope

AFM and inverted light microscopy

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

HT-110
HT-110

On-line TOC analyzer

ICP Neo
ICP Neo

ICP Software

OmegaScope
OmegaScope

The AFM optical platform

OPSA-150
OPSA-150

Organic pollutant monitor

SLIA-5000
SLIA-5000

Silica analyzer

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

TRIOS
TRIOS

Versatile AFM Optical Coupling

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

HU-200SS
HU-200SS

Field-installation type MLSS meter

HU-200TB-H
HU-200TB-H

Field-installation type turbidity meter

HU-200TB-IM
HU-200TB-IM

Field-installation type turbidity/SS meter

HU-200TB-W
HU-200TB-W

Field-installation type turbidity meter

OPSA-150
OPSA-150

Organic pollutant monitor

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

U-50
U-50

Multi-parameter water quality checker