HZ-960

Dissolved Ozone Monitor

A dissolved ozone concentration monitor designed for semiconductor devices,  wet processing for liquid crystal and glass.

Accommodating low-concentration chemical treatment, it is ideal for measuring a wide range of dissolved ozone concentrations, up to a maximum of 500 ppm.

O3

DC24VTransmission OutputContact OutputLow Concentration

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Abundant measurement options

In addition to the standard measurement range of 0-100 mg/L for ozone, it offers three additional measurement ranges.  Suggestions for the optimal range is provided.

Choice of pipe sizes

In addition to the standard 3/4 inch, choices can be made from 1/2 inch and 1 inch sizes.

High reproducibility accuracy and stability accuracy

Reproducibility accuracy within FS +/- 0.2%.

Corresponding detector ZH-10 ZH-40 ZH-100 ZH-500
Measurement range 0 - 10.00mg/L 0 - 40.00mg/L 0 - 100mg/L 0 - 500mg/L
Supply temperature                    5 - 30 deg.C 5 - 80 deg.C
Chemical contact material of detector PFA, PTFE, quartz glass
Supply pressure Within 0.5 MPa
Repeatability +/- 0.2% of full scale
Linearity +/- 1.0% of full scale
Transmission output Number of output: 2
Contact output Number of output: 5
Contact input Number of input: 2
Communication output RS-485
Power supply Rated voltage 24 +/- 10% V DC, 15W

Schematics

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