Industry
Pressure Insensitive Mass Flow Module CRITERION D500
Overview
The leading-edge Pressure Insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. The CRITERION D500 has all performance for the advanced semiconductor manufacturing process; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal.
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Features
- Pressure Insensitive Performance
A new high-performance Pressure Insensitive function provides for simplified gas supply systems - Multi-range,multi-gas,multi-pressure solution
The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range - G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function
The advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput - High Accuracy
Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment - Fast Response
Response: < 0.8 second
Accurate, stable flow control has been realized - Dynamic Range
Wide control range: 0.2% F.S. to 100% F.S.
About structure & performance of CRITERION
Manufactured by HORIBA STEC
Specifications
Applications
- Leading-edge semiconductor manufacturing process
Downloads
- Technical Article
Pressure-Based Mass Flow Control Module CRITERION D507 Series (1.7MB)
Abstract
"Recently, with the increase of application of a semiconductor device according to IoT, the latest semiconductor factories are focusing to minimize the downtime of the apparatus. Therefore, for the purpose of failure pre-detection of semiconductor tools and its components, the managed parameters of semiconductor process are increased, and its specification is getting tighter. In order to satisfy the required control criteria, the mass flow control module is required to have high-speed communication and failure pre-detecting function as well as flow rate accuracy and reproducibility, inlet pressure insensitivity performance. D507 series is lined up on D500 series to meet strict management at recent semiconductor factory."