Semiconductor Instruments & Systems
Digital Mass Flow Controllers
Used to precisely regulate the supply of gas and liquid in semiconductor processes, these devices block the impact of pressure and temperature changes on the line, permitting stable control of flow. The HORIBA Group is the first to commercialize high-performance, multifunctional digital mass flow controllers with built-in CPUs.
Residual Gas Analyzer
Recent semiconductor processes have reached the nano level, and a topic of much concern is whether or not the prescribed chemical/physical response conditions can be reproduced consistently. In particular, attention has been focused on the measurement and analysis of residual gas in the reaction vessels of the various vacuum devices used in dry processes. HORIBA STEC offers a residual gas analyzer (RGA) with the world’s smallest quadropole mass spectrometer.
Ultra-Thin Film Analyzers
This fully automated measuring system was developed for ultra-thin film used in the manufacture of semiconductor devices. It is used in the spectroscopic ellipsometers made by HORIBA JOBIN YVON. These advanced devices facilitate measurements of ultra-thin SiO2 layers or multilayers used in the most advanced CPUs and flash memories.
FTIR Gas Analyzers
FTIR gas analyzers enable the detection and measurement of a wide variety of substances, such as PFCs, greenhouse gases and semiconductor/FPD process gases, which must be reduced due to their contribution to global warming.
Reticle/Mask Particle Detection Systems
The reticle/mask particle detection systems combine optical technology and an innovative detection system. On reticles and masks, it can detect 0.35 µm particles and minimize detection errors with the ability to resolve 1.5 µm line width and 1.5 µm line spacing. The system is very useful for controlling particles in a lithography semiconductor device manufacturing process.