Cathodoluminescence

The CL series products use cathodoluminescence from samples generated by electron beam irradiation to perform solid-state evaluation in microscopic ranges, observation/evaluation of sub-surface structures and evaluation of widegap materials as well as defects and impurities. The CL series products also enable microscopic evaluation down to the nanometer level when combined with a field emission electron microscope, thereby contributing to progress in nanotechnology.

Applications

• Evaluation of impurities and defective materials in semiconductors
• Evaluation of stress distribution
• Evaluation of distribution of defective structure in oxide films
• Evaluation of light-emitting elements
• Evaluation of basic materials for electronic devices
• Analysis of device characteristics
• Evaluation of three-dimensional quantum structures