PEM

掲載年

タイトル

著者

掲載誌

2004

Coherent and incoherent interference modelling and measurement of anisotropic multilayer stacks using conventional ellipsometry

H. Touir, M. Stchakovsky, R. Ossikovski, and M. Warenghem

Thin Solid Films, 455-456 (2004) 628

2000

Anisotropic incoherent reflection model for spectroscopic ellipsometry of a thick semi-transparent anisotropic substrate

R. Ossikovski, M. Kildemo, M. Stchankovsky, and M. Mooney

Appl. Opt., 39 (2000) 2071

1998

Measurement of absorption edge of thick transparent substrates using incoherent reflection model and spectroscopic UV-Visible-near IR ellipsometry

M. Kildemo, R. Ossikovski, and M. Stchakovsky

Thin Solid Films, 313-314 (1998) 108

その他

掲載年

タイトル

著者

掲載誌

2004

Mueller matrix spectroscopic ellipsometry: formulation and application

A. Laskarakis, S. Logothetidis, E. Pavlopoulou, and M. Gioti

Thin Solid Films, 455-456 (2004) 43

1998

Multiple minima in the ellipsometric error function

S.A. Alterovitz, and B. Johs

Thin Solid Films, 313-314 (1998) 124

1997

Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties

F.K. Urban III, and D. Barton

Thin Solid Films, 308-309 (1997) 31-37

1996

The calculation of thin film parameters from spectroscopic ellipsometry data

G.E.Jellison,Jr.

Thin Solid Films, 290-291(1996), 40

1982

Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysis

B. Drevillon, J. Perrin, R. Marbot, A.Violet, and J.L. Dalby

Rev. Sci. Instrum., 53 (1982) 969

1969

An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique

S.N. Jasperson, and S.E. Schnatterly

Rev. Sci. Instrum., 40 (1969) 761