용존 오존모니터 OZ-96

개요

기술의 발전으로 오존수가 반도체 세척 공정과  resist separation공정에서 쓰이고 있습니다. 용존 오존농도모니터OZ-96은 저농도에서부터 고농도까지의 넓은 범위의 측정이 가능합니다.

기능

  • Compact DIN96 size
  • Simultaneous display of measured values and parameter settings
  • Two-stage gain amp compatible with high concentrations
  • Single detector capable of measurement of low and high concentrations
  • 4-channel alarm contact
  • Transmission output (4-20 mA DC)
  • Simple operation confirmation mechanism
  • 24 V DC power supply (CE-compatible)
  • Adjusting function of light souce

제조원 HORIBA Advanced Techno

사양

Model

OZ-96

Measurement target

Ozone concentration in ultra-pure water

Measurement principle

UV absorption (254 nm)

Measuring range

0-100 mg/L

Reproducibility

Within ±0.5 mg/L

Stability

Zero point change : Within 0.5 mg/L/day

Span sensitivity change: Within 0.5 mg/L/day

Transmission output

4-20 mA DC isolated input/output type max. load resistance: 500 Ω

Transmission output range

0-5, 0-10, 0-20, 0-50, 0-100 (mg/L)

Control function

4-channel contact output

capacity: 250 V AC, 3 A max.

Low lower limit, lower limit, upper limit, high upper limit

Additional functions

Zero point calibration

Span sensitivity adjustment (coefficient input)

Simple operation confirmation

Measurement conditions

Pressure: Within 0.3 MPa

Flow rate: 100 mL/min (50-300 mL/min)

Temperature: 5-30°C

Purge detector with dry air under conditions of moisture condensation

Power supply

DC 24 V, 2 A

Structure

Panel-mounted: DIN 96 x 96, Indoor installation

Case: SPCC

Panel: ABS

External dimensions

96(W) x 96(H) x 145(D), case depth: 135 mm

Weight

Approx. 650 g

관련 제품

In-line type Dissolved Ozone Monitor OZ-96i

반도체 생산공정에서 오존 농도관리에 최적