MV-2000

MV-2000 Series

Mixed Injection System Liquid Vaporizer

MV-2000은 혼합 분사 시스템 액체 기화기입니다. MV-2000은 새로운 토네이도 흐름 방식을 사용하여 저온에서도 안정적인 기화를 실현합니다. 이 제품은 열분해되기 쉬운 액체 소스인 "High-k"와 같은 까다로운 소스에서도 다양한 액체를 증발시키는 데 적합합니다.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Stable vaporization at low temperature using the new tornedo flow method
  • Higher flow rate vaporization (add the stability data)
  • Can vaporize a liquid source which is pyrolyzed easily
 
ModelMV-2000
Liquid MaterialAll liquids except those corrosive to stainless steel(ex. HCl, HF)
Setting TemperatureBy vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C)
Leak Integrity≤ 1 × 10-8 Pa·m3 /s (He)
Internal leak standard≤ 1 × 10-6 Pa·m3 /s (He)
Wetted partsSUS316L , PFA
Temperature SensorThermocouple type K (CA)
Pressure Resistance1MPa (G)
Standard FittingLiquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male
Operating Temperature15 - 50 ˚C
OptionAir valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) )
  • The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
  • The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.

 

External Dimension

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories

제품 문의

HORIBA제품의 자세한 정보를 원하시면, 아래의 양식에 내용을 입력을 부탁드립니다.

* 는 필수입력항목입니다.

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