TG-510 / CU-1 ambinet hydrogen sulfide gas monitor
Overview
TG-510 and CU-1 Ambient hydrogen sulfide analyzer in Semiconductor clean room is monitoring life time of chemical filter to remove hydrogen sulfide gas in real time. It enables to get reliable measurement value to measure differential concentration between ambient sulfuric dioxide through decontamination treatment and increased sulfuric dioxide after oxidation catalyst reaction as hydrogen sulfide concentration directly with Ultra Violet Fluorescence method. In order to reduce measurement error by water concentration fluctuation in ambient, humidifier is set at sample line. It enables long-term stability according to stabilizing catalytic reaction.
Features
- System configuration of SO2 analyzer with converter unit(CU-1) to be oxidized H2S into SO2.
- No utility is required such as carrier gas and column.
Manufactured by HORIBA
Specifications
Measurement component | Hydrogen sulfide(H2S）in clean room ambient air |
Measurement principle | Oxidation catalyst + Ultra Violet Fluorescence |
Measurement range | 0～10/20/50/100ppb |
Lower detectable limit | 0.15ppb |
Repeatability | ±3.0％ of F.S. |
Linearity | ±2.0％ of F.S. |
Zero drift | ±2% of F.S./day |
Span drift | ±5% of F.S./day |
Response time(T90) | 180 sec. or less (from CU-1 converter unit) |
Sample gas flow rate | approx. 0.8L/min |
Operation gas | None |
Indication | Measuring value, alarm |
Alarm | CU-1: Temperature error in catalyzer |
Input / Output | 0～1V / 0～10V / 4～20mA (2 systems: either (1) momentary value and integrated of (2) moving average value) |
Temperature/Humidity | 0～40℃ 85％ or less |
Power | AC100V±10V 50/60Hz |
Power consumption | CU-1: 150VA |
Dimension | CU-1: 430(W) X 550(D) X 221(H) mm |
Mass | CU-1: approx. 10kg |