In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

Обзор

Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capibility of cleanliness with all PFA sensors. Measurement range: 0 - 50%.

Особенности

  • Wide range measurement, from low concentration to undiluted liquid. Measurement range: 0 - 50%.
  • High precision measurement by the auto-correction range switching function.
  • All PFA sensors, ideal for semiconductor processing
  • 24 V DC power supply
  • RoHS compliant

Изготовитель HORIBA Advanced Techno

Спецификации

Specifications of HF-960EM

Model name

HF-960EM

Measurement range

HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm

Repeatability

+/- 0.5% F.S. (in equivalent input)

Linearity

+/- 0.5% F.S. (in equivalent input)

Transmission output

Number of output: 4

Contact output

Outputs: 5 points

Contact input

Inputs: 2 points

Communication output

RS-485

Power supply

DC 24 V +/- 10% 15W

Compatible sensor

CM-520 Series

Wetted material of sensor

PFA

Схемы

Dimensions of HF-960EM

Применения

  • HF concentration moitoring for the Oxide etching proces, bare wafer to the finest etching process.