Thin Film Thickness

Spectroscopic ellipsometers are capable of measuring thin film thicknesses ranging from 1 Å to > 30 µm for single and complex multi layer thin films. Materials have to be transparent or semi-transparent. Due to the strong absorption of metal and ceramic films, thickness measurement of such materials are limited to less than 0.3 µm thick.

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Sample mapping for film thickness uniformity

By the simple use of an automated XY sample stage it is possible to map thin film thickness uniformity over the complete sample structure.