Ellipsometry Software

DeltaPsi 2 software

Powerful and Advanced DeltaPsi 2 Software

HORIBA Scientific’s spectroscopic ellipsometers are driven by the powerful and advanced DeltaPsi 2 software, designed for accurate and flexible measurement and characterization of thin film structures.

Auto Soft interface

Intuitive Auto-Soft Interface for the Auto SE and Smart SE

The HORIBA Smart SE and Auto SE spectroscopic ellipsometers also include the easy-to-use Auto Soft interface designed for fast and easy routine thin film measurement and characterization.