EMAX x-act- Liquid nitrogen less X-ray Detector

Overview

Liquid nitrogen less X-ray Detector (Optional type)

EMAX x-act achieved good energy resolution which is unprecedented level in light element using a unique silicon drift sensor (SDD) and combination with the digital pulse processor assure providing accurate results under all conditions.

Available in Japan, China, Korea, India, Taiwan, Shingapore, Malaysia, Philippines, Thailand, Indonesia, Vietnam, Pakistan

Features

  • LN2 less detector - Quick start up
  • Quick analysis - Decreasing mapping time by high counting rate performance
  • High operational stability - Stable performance up to high counting ranges in both qualitative and quantitative analysis
  • All EMAX software functions are available - Navigator, Help function, Quantitative map etc

Analysis Examples


Manufactured by HORIBA

Specifications

Model

EX-250
x-act

EX-350
x-act

EX-450
x-act

Detector

Type

Standard

Premium

Premium

Resolution

135eV

129eV

129eV

Capability comparison

Analyzer

 

 

 

Qualitative analysis
(Automatic qualitative analysis and
KLM marker)

O

O

O

Spectrum comparison

O

O

O

Spectrum overlay

O

O

O

Element catcher

O

O

O

Quantitative analysis

O

O

O

Spectrum matching

Option

Option

O

Spectrum synthesis (Check total)

O

O

O

Mapping

 

 

 

Stored entire elemental information
of SEM image (Smart Map)

O

O

O

Line Scan

O

O

O

Quantitative Map

Option

O

O

Phase analysis (Phase map)

Option

O

O

Distribution analysis of multipul elements
(Cameo plus)

Option

O

O

Point & ID

 

 

 

Automatic data collection of analysis area
/Spectrum reconstruction

O

O

O

Point spectrum (Line & Grid)

Option

O

O

Automatic wide area analysis (Automate)*

Option

Option

O

Wide area mapping (Montage)**

Option

Option

O

Automatic particle analysis (Features)*

Option

Option

O

GSR*

Option

Option

O

Drift correction (Site Lock)

Option

O

O

*: Required auto stage and communication function on the SEM. Please check available SEM model
**: Wide area mapping (Montage) require the "Automatic wide area analysis(Automate)".

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