Capacitance Manometer VG Series

Overview

Compact and all metal capacitance manometer which has self temperature adjustment type

Features

  • Compact self heating design
  • High performance and high stability resulting from innovative electrode structure
  • Excellent corrosion resistance with Ni alloy diaphragm
  • Set point output (2 points)
  • Alarm output
  • Range adjustment by dedicated software
  • ONE PUSH ReZero
  • Power requirements +/-15VDC or 24VDC
  • CE & RoHS compliant

Manufactured by HORIBA STEC

Specifications

Model

VG-200

Full Scale Range

1.3332kPa/13.332kPa/133.32kPa

Sensor Controled Temperature

55°C/100°C

Accuracy Including non-linearity, hysteresis, non-repeatability * 

0.25%R.S.

Resolution

0.01%F.S

Zero Temp. Coefficient

0.0025%F.S./°C

Span Temp. Coefficient

0.02%R.S./°C

Operating Temperature

10°C to 45°C(55°C),10°C to 50°C(100°C)

Response time

<60msec

Warm Up time

60min(55°C),120min(100°C)

Proof Pressure

350kPa(A)

Output

Analog 0-10V, load resistance: 10kΩ or more

Supply Voltage

±15VDC ±5% or 24VDC±5% @0.6Amax

Setpoint

Contact form: 1a,1b, Number of setpoint: 2 Current charge capacity: 0.1A @30VDC

* Including non-linearity, hysteresis, non-repeatability at 25℃ ambient temperature after 2hours operation.

Type / Specification

 

1. Full scale

2. Heater set temperature

3. Fitting

Branch number 

VG-221

11T : 1.3332kPa(10Torr) 12T : 13.332kPa(100Torr) 13T : 133.32kPa(1000Torr)

055 : 55°C
100 : 100°C

KF16 : KF16 8CR : 1/2VCR-F
CF34 : ICF34

 

● Please choose full scale,heater set temperature and fitting. ● Please contact us If you need alarm initial setting.

 

 

Schematics

Capacitance Manometer VG Series_Dimensions

Applications

  • Vacuum dry chamber
    LIB(Lithium ion battery electrode), FPD(Flat panel display)
    Chamber vacuum monitoring after solvent applying.
  • Vacuum heating furnace
    Process optimization, enhance process yield.
  • Freeze dry chamber
    Optimize quality control in freezing dry process of medicine and food.