Piezo actuator valve

Overview

The PV-1000/2000 series consists of piezo actuator valves with metal diaphragms and metal O-rings. Combine with a pressure sensor or flow rate sensor and ratio control unit (PCU series) to create a pressure control or flow rate control system.

Piezo actuator valves: The PV series units perform pressure control in accordance with a control signal from an external unit. The pressure signal from the pressure sensor and the control signal from the external unit are inputted to the PCU-1000/2100.
The control unit’s internal PID circuits calculate the optimal control conditions and output a signal to the piezo actuator valve. The PCU-2100 control unit also features a pressure control signal setting function..

Features

Ultraclean All metal construction
Supports a wide flow range
Hightemperaturemodels PV-1000S/2000S types
Pressure control from an external unit

Manufactured by HORIBA STEC

Specifications

PV-1000

Flow Range	1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)

PV-2000

Flow Range	10/20 LM
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)