Chemical Solution Concentration Monitor,
Overview
The HORIBA CS-100F1 Series of chemical solution concentration monitors target the need for highly accurate concentration monitoring of chemical solutions used in the etching and cleaning processes during semiconductor manufacturing. They offer real-time, inline measurement by directly integrating the sample cell into the cleaning system piping, by using fiber optic cable for light signal transmission, a single concentration monitor can be used to measure up to four types of chemical solutions; or ranges and single-line monitoring of multiple chemical solutions in single-bath/single-wafer cleaning systems. In addition a cell unit type is available with feedback concentration control for applications that demand higher accuracy.
Features
- Multiple point monitoring of up to four types (chemical solution or range) with a single monitor.
- Inline measurement allows for simple and effective real time monitoring.
A cell unit type is also available for those critical applications that demand higher accuracy. - Supports concentration control for 300 mm processes with approx.
3 sec. measurement cycle. - Increased stability by complete isolation of the electrical and measurement parts.
- Compact and lightweight, the design saves space in wet cleaning system installations.
- Reduced lot failures boost yields in the cleaning process.
Manufactured by HORIBA
Specifications
Model | CS-151F1 | CS-152F1 | CS-150F1 |
Target of measurement | SC-1 (ammonia/hydrogen peroxide aqueous solution) | SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution) | SPM (sulfuric acid/hydrogen peroxide aqueous solution) |
Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible. | |||
Measurement principle | Absorption spectrometry | ||
Concentration computation principle | Temperature-compensated multivariate analysis | ||
Measurement range (mass %)
| NH3 : 0.00% to 1.00% H2O2 : 0.00% to 5.00% H2O : 94.0% to 100.0% | HCI : 0.00% to 2.00% H2O2 : 0.00% to 2.00% H2O : 96.0% to 100.0% | H2SO4 : 70.0% to 96.0% H2O2 : 0.00% to 10.00% H2O : 4.0% to 30.0% |
Repeatability (mass %) (within ±1% room temperature)
| NH3 : ±0.15% H2O2 : ±0.30% H2O : ±1.5% | HCI : ±0.15% H2O2 : ±0.15 % H2O : ±1.5% | H2SO4 : ±0.50% H2O2 : ±0.50% H2O : ±1.5% |
Sample solution temperature | 20 to 80 : (when using Inline cell) 20 to 30 : (when using cell unit) | ||
Measurement cycle | Approx. 3 seconds | ||
Content of | • 1st component: measured concentration value (%) | • Error code |
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LCD and input
| • 2nd component: measured concentration value (%) • 3nd component: measured concentration value (%) • 1st and 2nd components: concentration alarm status | • Parallel concentration alarm output invalid status • Serial/parallel status • Background compensation data |
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RS-232C serial input | • Serial/parallel status switching • Measurement data transfer request • 1st and 2nd component concentration alarm setting | • Parallel concentration alarm output status (valid/invalid) • Target measurement solution switching |
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Parallel input | 12 to 30 V DC (photocoupler insulated) | • Parallel concentration alarm output • Target measurement solution switching • Background compensation |
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Parallel output | Open collector output (photocoupler insulated) Max. current when on: DC 5 mA (no internal protection resistor) Max. ignition voltage when off: 30 V DC
| • 1st component concentration alarm, 4 types • 2nd component concentration alarm, 4 types • Device error • Measuring • Target measurement solution type • Background compensation status |
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Solution temperature input | Terminal block connection (M3 terminal screws) | ||
Analog output | • 1st component concentration alarm, 4 types: 4 to 20 mA • 2nd component concentration alarm, 4 types: 4 to 20 mA * We also support other measurement ranges. Please specify when ordering. | ||
Fiber optic cable | Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature) | ||
ample cell | We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions. | ||
Power supply | 100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA | ||
Dimensions | 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part) | ||
Weight | Approx. 11 kg | ||
Analog output | 4 to 20 mA (2 outputs: H2SO4: 50.0 to 100.0 %/H2O: 0.00 to 10.00 %) The analog output can be prepared to correspond to each requirement by users. (Please specify when ordering.) | ||
Power | 24 V DC ±10%, 2 A | ||
Dimensions | 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13 (D) x 10.6 (H) in | 291 (W) x 329 (D) x 269 (H) mm 11.5 (W) x 13 (D) x 10.6 (H) in | |
Mass | Approx. 11 kg | Approx. 12 kg | |
Connection pipe size | For inlet and outlet: Outer diameter 6 mm (inner diameter 4 mm) | ||
Pipe connection | Nippon Pillar Super type | ||
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