Mass Flow Controller & Meter
HORIBA offers a wide variety of Mass Flow Controllers and Mass Flow Meters (MFC & MFM) to meet your needs; all of our products provide high accuracy and a quick response time. With our various models of Gas Flow Meters and Gas Flow Controllers you can select the most suitable one for you. We offer three types of valves, you can choose from thermal, solenoid, or Piezo. We also have various communication types including analog, digital, DeviceNet™, PROFIBUS™, and EtherCAT® (*) (depending on product models). Our wide flow rate ranges from micro to large.
* Devicenet is a trademark of Open DeviceNet Vender Association.
PROFIBUS is a trademark of PROFIBUS International.
EtherCAT is a trademark of Beckhoff Automation GmbH, Germany.
Top of the Range
The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.
Class Leading Performance
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
General Purpose (Digital/Analog communication)
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link, and PROFIBUS™. Wide control range from 10 SCCM to 1000 SLM. All-metal.
General Purpose (Analog communication)
The PE-D20 control unit integrates high frequency functions via the front panel controls.
The PE-D10 is a standalone unit for use with mass flow meters.
The PE series of dedicated power sources can be used as drive power sources for mass flow controllers, meters, and auto pressure regulator as well as for dedicated display units, and supply the standard flow rate setting voltage. The series includes a lineup of models that have flow rate alarm output function, models offering 0 signals and 4 to 20mA, and models that are capable of driving up to six units.
The DU-102E and DU-103K display the flow rate output signal from mass flow controllers and meters. Matching these units to the full-scale flow rate values of mass flow controllers and meters enables direct monitoring of control and measured flow rates.
The CA series are conversion adapters that can be utilized when other manufactures mass flow control systems are used with mass flow controllers and meters. Simply select the appropriate adapter for your needs.