Mass Flow Controller & Meter

HORIBA offers a wide variety of Mass Flow Controllers and Mass Flow Meters (MFC & MFM) to meet your needs; all of our products provide high accuracy and a quick response time. With our various models of Gas Flow Meters and Gas Flow Controllers you can select the most suitable one for you. We offer three types of valves, you can choose from thermal, solenoid, or Piezo. We also have various communication types including analog, digital, DeviceNet™, PROFIBUS™, and EtherCAT® (*) (depending on product models). Our wide flow rate ranges from micro to large.

* Devicenet is a trademark of Open DeviceNet Vender Association.
   PROFIBUS is a trademark of PROFIBUS International.
   EtherCAT is a trademark of Beckhoff Automation GmbH, Germany. 

Find out more about Mass Flow Meters here.
Find out more about the characteristics of a Digital Mass Flow Controller here.
Learn more about HORIBA's CRITERION D500 Digital Mass Flow Module here.

Top of the Range

Pressure Insensitive Mass Flow Module D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

Class Leading Performance

Pressure Insensitive Mass Flow Controller  SEC-Z700X

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.

Best Selling

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

General Purpose (Digital/Analog communication)

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link, and PROFIBUS™. Wide control range from 10 SCCM to 1000 SLM. All-metal.

General Purpose (Analog communication)

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Mass Flow Controller SEC-400 Series

The economy mass flow controller installed with thermal valve.

High Temperature

High Temperature Digital Mass Flow Controller SEC-8000 F/D Series

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.


multi-function control unit

This multi-function control unit is equipped with a program setting function, preset function, and integrating function. The front panel simplifies operation.


The PE-D20 control unit integrates high frequency functions via the front panel controls.


The PE-D10 is a standalone unit for use with mass flow meters.


The PE series of dedicated power sources can be used as drive power sources for mass flow controllers, meters, and auto pressure regulator as well as for dedicated display units, and supply the standard flow rate setting voltage. The series includes a lineup of models that have flow rate alarm output function, models offering 0 signals and 4 to 20mA, and models that are capable of driving up to six units.

Display unit DU series

The DU-102E and DU-103K display the flow rate output signal from mass flow controllers and meters. Matching these units to the full-scale flow rate values of mass flow controllers and meters enables direct monitoring of control and measured flow rates.

Signal cables and conversion adapters SC/CA series

The SC series consists of signal cables that connect mass flow controller and meters to control units. The SC series includes a serge provision by a shield cables. Simply select the appropriate adapter for your needs.


The CA-E series are conversion adapters that can be utilized when other manufactures mass flow control systems are used with mass flow controllers and meters. Simply select the appropriate adapter for your needs.

Settings units SU-503ED/502EA

Dedicated power source: These setting units convert the standard flow rate setting voltage input (+5 VDC) to the desired type of flow rate and pressure setting signal and input that to the controller.

MFT20 mass flow controller tester image

The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.