FTIR Gas Analyzer,

• Data sampling possible down to intervals of 0.6 seconds*
  "Speed Priority Mode" can be selected at the time of measurement to perform data sampling at a cycle of less than one second. This is effective for recipes that are completed in a short time and for precise verification of the behavior of exhaust gas when conditions are changed.
  *Depending on measurement conditions.
• Compact and ease of use makes it ideal for those environments where space is a premium.

The FG-100A Series can be easily carried and installed in small spaces for efficient analytical performance.

• Single and dual cell models available.
  Dual cell models enable continuous monitoring, with single-touch changeover, ideal for situations where sampling is done at two points that vary widely in concentration, such as at the inlet and outlet of an abatement system. This eliminates the need to purge and contributes to rapid and efficient gas analysis.
• A line up of five cell optical path lengths for optimal matching to your gas-density sampling situation.
  Five cell optical path lengths (0.01, 0.1, 0.8, 2.4, and 10 m). Depending on the concentration in the sample, simply swap in a cell unit of appropriate optical path length to enable highly precise measurement. Cells are also available for measuring gas concentrations in a decompressed state immediately following the processing chamber.
• Continuous monitoring with an optimal liquid-nitrogen-free detector
  Electronically cooled MCT detectors are used to eliminate the complications of providing liquid-nitrogen inside the clean room. Continuous monitoring can be smoothly implemented.
• Extensive library
  More than 38 types of spectra and calibration curves for semiconductor and FPD processes are provided as a standard library. In addition, efficient gas analysis is supported with a lineup of more than 260 types of spectra.
  BCl3    CF4    CO    OF2    TEOS
  C2F4    CH2F2    H2O    SF6    TMB
  C2F6    CH3F    HF    SiCl2H2    WF6
  C3F6    CH4    N2O    SiF4    C2H2F2
  C3F8    CHF3    NF3    SiH4    C2H3F
  C4F6    ClF3    NH3    SO2F2    C2HF3
  C4F8    CO2    NO2    SO2  
  C5F8    COF2    NO    SOF2 
• Precision to sub-ppm level
  The use of a cell with a long optical path length enables measurement of low-concentrations down to the sub-ppm level.
• Measurement precision for typical constituent gases
  Constituent gas    Detection limit      
  CF4    0.003 ppm    SF6    0.003 ppm
  C2F6    0.005 ppm    HF    0.25 ppm
  C3F8    0.005 ppm    SiF4    0.006 ppm
  C4F8    0.01 ppm    NH3    0.05 ppm
  CHF3    0.009 ppm    NO2    0.04 ppm
  NF3    0.02 ppm    CO    0.3 ppm
• Measurement condition:
  Liquid-nitrogen-cooled MCT detector with 10 m cell optical path length
  *By optimizing the conditions of analysis, it may be possible to obtain even greater precision.
• User friendly software
  A variety of functions are provided as standard features, including concentration trend display which is ideal for real-time analysis, automatic spectra storing, and automatic storing of concentration log files. A navigation function supports the procedure for creating calibration curves, making it possible even for first-time users to create calibration curves by multivariate analysis. The operation can be accomplished on a Windows® notebook computer.
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