Multi Range/ Multi Gas SEC-Z500X

Overview

The mass flow controller is a key piece of semiconductor manufacturing equipment. Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process.

HORIBA STEC, a company that has consistently introduced high-quality, highly functional products to the demanding semiconductor manufacturing market, and thereby grown its worldwide market share to over 35%*1, has recently introduced a new mass flow controller.

The Z500X series breaks the mold completely and will change the future of mass flow control technology. It provides all the mass flow functions customers need, including the flexibility to handle different gas types and flow volumes. The customer can quickly and easily alter its specifications to suit changing needs*2.

With RoHS compliance it makes it the perfect environmentally friendly tool for improving corporate value. The highly functional Z500X series is brimming with previously unknown charm.

The world is witnessing the birth of a mass flow controller that will change the future of the semiconductor industry.

*1 From VLSI's 2007 Research Report.

*2 Multi-gas, multi-range function

Features

  •  High Accuracy ±1.0% S.P.
    MFC's linearity is compensated by polynomial approximated curve. This achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC standard gas measurement system.
  • High Speed Response
    SEC-Z500X is installed with a newly developed "Variable PID system", which can achieve 1 second response between any two set points. Variable PID is continuously changing depending on the flow point setting. This allows the PID factor to be optimized when the full scale flow and gases are changed.
  • Multi-gas, multi-range solution
    HORIBA STEC has made it possible for the user to change the type of gas or full-scale flow rate on site. Our Z500 configuration software makes it possible to change these specifications quickly and easily. Best of all, the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers users need to store, and helps save both time and money.

Manufactured by HORIBA STEC

Specifications

 

SEC-Z512X and SEC-Z522X Digital / Analog Mass Flow Controller, for flows up to 50slm N2 equivalent. Detailed specification click here.

SEC-Z532X and SEC-Z542X Digital / Analog Mass Flow Controller, for flows up to 200slm N2 equivalent. Detailed specification click here.

SEC-Z514X and SEC-Z524X Devicenet™ Mass Flow Controller, for flows up to 50slm N2 equivalent. Detailed specification click here.

SEC-Z534X and SEC-Z544X Devicenet™ Mass Flow Controller, for flows up to 200slm N2 equivalent. Detailed specification click here

 

Schematics