Mass flow controllers SEC-400 series

SEC-400

Overview

Since 1980, when HORIBA STEC created the SEC-L, the first mass flow controller manufactured entirely in <country-region><place>Japan</place></country-region>, the company has continued to develop and produce mass flow controllers to meet a wide variety of customer needs. The SEC-400 series, which use thermal valves, has the same reliable control capabilities as the SEC-L, and is already used all over the world.

Features

  • High precision　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　±0.5% F.S.:SEC-405(limited gas compatibility)
  • Compatible with a wide variety of flow rate control needs　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　Flow rate control between 0.1SCCM and 200SLM(N2) available in a single series.
  • Compact: 106 mm between surfaces: SEC-300 type
  • Low cost: A lineup of cost effective models: SEC-400MK3/500MK3

Manufactured by HORIBA STEC

Specifications

SEC-400 Specifications

Schematics